| 1. | Nano- and Microengineering, and Nano- and Microtechnologies | 1 |
| 1.1. | Introduction | 1 |
| 1.2. | Biological Analogies | 3 |
| 1.3. | Nano- and Microelectromechanical Systems | 5 |
| 1.4. | Applications of Nano- and Microelectromechanical Systems | 10 |
| 1.5. | Nano- and Microelectromechanical Systems | 15 |
| 1.6. | Introduction to MEMS Fabrication, Assembling, and Packaging | 19 |
| 2. | Mathematical Models and Design of Nano- and Microelectromechanical Systems | 23 |
| 2.1. | Nano- and Microelectromechanical Systems Architecture | 23 |
| 2.2. | Electromagnetics and its Application For Nano- and Microscale Electromechanical Motion Devices | 35 |
| 2.3. | Classical Mechanics and its Application | 58 |
| 2.3.1. | Newtonian Mechanics | 60 |
| 2.3.2. | Lagrange Equations of Motion | 76 |
| 2.3.3. | Hamilton Equations of Motion | 93 |
| 2.4. | Atomic Structures and Quantum Mechanics | 95 |
| 2.5. | Molecular and Nanostructure Dynamics | 105 |
| 2.5.1. | Schrodinger Equation and Wavefunction Theory | 106 |
| 2.5.2. | Density Functional Theory | 110 |
| 2.5.3. | Nanostructures and Molecular Dynamics | 114 |
| 2.6. | Molecular Wires and Molecular Circuits | 115 |
| 2.7 | Thermoanalysis and Heat Equation | 126 |
| 3. | Structural Design, Modeling, and Simulation | 129 |
| 3.1. | Nano- and Microelectromechanical Systems | 129 |
| 3.1.1. | Carbon Nanotubes and Nanodevices | 129 |
| 3.1.2. | Microelectromechanical Systems and Microdevices | 132 |
| 3.2. | Structural Synthesis of Nano- and Microelectromechanical Actuators and Sensors | 166 |
| 3.2.1. | Configurations and Structural Synthesis of Motion Nano- and Microstructures (actuators and Sensors) | 166 |
| 3.2.2. | Algebra of Sets | 173 |
| 3.3. | Direct-Current Micromachines | 176 |
| 3.4. | Induction Motors | 196 |
| 3.4.1. | Two-Phase Induction Motors | 197 |
| 3.4.2. | Three-Phase Induction Motors | 209 |
| 3.5. | Microscale Synchronous Machines | 229 |
| 3.5.1. | Single-Phase Reluctance Motors | 230 |
| 3.5.2. | Permanent-Magnet Synchronous Machines | 230 |
| 3.6. | Microscale Permanent-Magnet Stepper Motors | 279 |
| 3.6.1. | Mathematical Model in the Machine Variables | 279 |
| 3.6.2. | Mathematical Models of Permanent-Magnet Stepper Motors in the Rotor and Synchronous Reference Frames | 283 |
| 3.7. | Nanomachines: Nanomotors and Nanogenerators | 296 |
| 4. | Control of Nano- and Microelectromechanical Systems | 299 |
| 4.1. | Fundamentals of Electromagnetic Radiation and Antennas in Nano- and Microscale Electromechanical Systems | 299 |
| 4.2. | Design of Closed-Loop Nano- and Microelectromechanical Systems Using the Lyapunov Stability Theory | 312 |
| 4.3. | Introduction to Intelligent Control of Nano- and Microelectromechanical Systems | 327 |
| Index | 335 |